Carbon Nanotube Field-Effect Transistors: Towards Entire-Carbon-Nanotube Circuits: The Fabrication of Single-Walled-Carbon-Nanotube Field-Effect Transistors with Local Multiwalled-Carbon-Nanotube Interconnects (Adv. Mater. 13/2009)

Authors

  • Xuelei Liang,

    Corresponding author
    1. Key Laboratory for the Physics and Chemistry of Nanodevices, and Department of Electronics, Peking University Beijing 100871 (PR China)
    • Key Laboratory for the Physics and Chemistry of Nanodevices, and Department of Electronics, Peking University Beijing 100871 (PR China).
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  • Sheng Wang,

    1. Key Laboratory for the Physics and Chemistry of Nanodevices, and Department of Electronics, Peking University Beijing 100871 (PR China)
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  • Xianlong Wei,

    1. Key Laboratory for the Physics and Chemistry of Nanodevices, and Department of Electronics, Peking University Beijing 100871 (PR China)
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  • Li Ding,

    1. Key Laboratory for the Physics and Chemistry of Nanodevices, and Department of Electronics, Peking University Beijing 100871 (PR China)
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  • Yuzhen Zhu,

    1. Key Laboratory for the Physics and Chemistry of Nanodevices, and Department of Electronics, Peking University Beijing 100871 (PR China)
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  • Zhiyong Zhang,

    1. Key Laboratory for the Physics and Chemistry of Nanodevices, and Department of Electronics, Peking University Beijing 100871 (PR China)
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  • Qing Chen,

    1. Key Laboratory for the Physics and Chemistry of Nanodevices, and Department of Electronics, Peking University Beijing 100871 (PR China)
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  • Yan Li,

    1. Key Laboratory for the Physics and Chemistry of Nanodevices and College of Chemistry and Molecular Engineering, Peking University Beijing 100871 (PR China)
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  • Jin Zhang,

    1. Key Laboratory for the Physics and Chemistry of Nanodevices and College of Chemistry and Molecular Engineering, Peking University Beijing 100871 (PR China)
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  • Lian-Mao Peng

    Corresponding author
    1. Key Laboratory for the Physics and Chemistry of Nanodevices, and Department of Electronics, Peking University Beijing 100871 (PR China)
    • Key Laboratory for the Physics and Chemistry of Nanodevices, and Department of Electronics, Peking University Beijing 100871 (PR China).
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Abstract

original image

Towards entire carbon nanotube (CNT) circuits: single-walled CNTs serve as channels (lowest layer) and multi-walled CNTs serve as interconnects (vertical vias and second/third layers). The polarity of the channel (p- or n-type) was defined by metals with different working functions at the contact points (the yellow and green contacts in the lowest layer). More details on single-walled CNT field-effect transistors with multiwalled CNTs as local interconnects can be found in the article by Xuelei Liang, Lian-Mao Peng, and co-workers on p. 1339.

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