Multifunctional Integrated Platforms: Fabrication of Advanced Functional Devices Combining Soft Chemistry with X-ray Lithography in One Step (Adv. Mater. 48/2009)

Authors

  • Paolo Falcaro,

    Corresponding author
    1. Laboratorio di Scienza dei Materiali e Nanotecnologie (LMNT), CR-INSTM Università di Sassari, Palazzo Pou Salid Piazza Duomo 6, 07041 Alghero SS (Italy)
    2. CSIRO, Division of Materials Science and Engineering Private Bag 33, Clayton South MDC, Victoria 3169 (Australia)
    • Laboratorio di Scienza dei Materiali e Nanotecnologie (LMNT), CR-INSTM Università di Sassari, Palazzo Pou Salid Piazza Duomo 6, 07041 Alghero SS (Italy).

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  • Luca Malfatti,

    1. Laboratorio di Scienza dei Materiali e Nanotecnologie (LMNT), CR-INSTM Università di Sassari, Palazzo Pou Salid Piazza Duomo 6, 07041 Alghero SS (Italy)
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  • Lisa Vaccari,

    1. Sincrotrone Trieste S.C.p.A. S.S. 14, Km163.5, 34012 Basovizza TS (Italy)
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  • Heinz Amenitsch,

    1. Institute of Biophysics and Nanosystems Research, Austrian Academy of Sciences Schmiedlstraße 6, 8042, Graz (Austria)
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  • Benedetta Marmiroli,

    1. Institute of Biophysics and Nanosystems Research, Austrian Academy of Sciences Schmiedlstraße 6, 8042, Graz (Austria)
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  • Gianluca Grenci,

    1. TASC, INFM National Laboratory S.S. 14, Km163.5 in Area Science Park, 34012 Basovizza, Trieste (Italy)
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  • Plinio Innocenzi

    Corresponding author
    1. Laboratorio di Scienza dei Materiali e Nanotecnologie (LMNT), CR-INSTM Università di Sassari, Palazzo Pou Salid Piazza Duomo 6, 07041 Alghero SS (Italy)
    • Laboratorio di Scienza dei Materiali e Nanotecnologie (LMNT), CR-INSTM Università di Sassari, Palazzo Pou Salid Piazza Duomo 6, 07041 Alghero SS (Italy).

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Abstract

original image

Combining bottom-up sol–gel assembly with micro- and nanofabrication offers a simple and fast route to develop multifunctional integrated platforms, from microfluidics to microarrays, allowing the chemistry and geometry to be tailored to the application, as reported by Paolo Falcaro, Plinio Innocenzi, and co-workers on p. 4932. The inside cover illustrates different patterns of functionalized surfaces. The background is an example of highly controlled microfluidic interface fabricated combining deep X-rays lithography with sol–gel syntheses.

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