Photoresist Latent and Developer Images as Probed by Neutron Reflectivity Methods
Article first published online: 16 SEP 2010
Copyright © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Special Issue: Polymer Science at NIST
Volume 23, Issue 3, pages 388–408, January 18, 2011
How to Cite
Prabhu, V. M., Kang, S., VanderHart, D. L., Satija, S. K., Lin, E. K. and Wu, W.-l. (2011), Photoresist Latent and Developer Images as Probed by Neutron Reflectivity Methods. Adv. Mater., 23: 388–408. doi: 10.1002/adma.201001762
- Issue published online: 3 JAN 2011
- Article first published online: 16 SEP 2010
- Manuscript Received: 12 MAY 2010
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