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Keywords:

  • nanolithography;
  • scanning probe lithography;
  • surface modification;
  • direct-write;
  • germanium nanowires
Thumbnail image of graphical abstract

Atomic force direct-write of carbon-free germanium nanostructures is easily accomplished via high-field reaction of liquid diphenylgermane precursor. Sub-30 nm features are written in arbitrary patterns at velocities as high as 100 μm s−1.