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Micrometer-Scale Cubic Unit Cell 3D Metamaterial Layers



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Membrane projection lithography is used to create vertically oriented split-ring resonators which show measured electric and magnetic resonances (λ = 22, 11, and 7 μm). We then create composite structures with 5 split ring resonators per unit cell (image). This approach provides a long-sought, manufacturable path toward the realization of 3D optical and infrared metamaterials.