Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers
Article first published online: 8 SEP 2010
Copyright © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Volume 22, Issue 45, pages 5129–5133, December 1, 2010
How to Cite
Peng, Q., Tseng, Y.-C., Darling, S. B. and Elam, J. W. (2010), Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers. Adv. Mater., 22: 5129–5133. doi: 10.1002/adma.201002465
- Issue published online: 30 NOV 2010
- Article first published online: 8 SEP 2010
- Manuscript Received: 8 JUL 2010
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