Single-crystal diamond nanowires with well-controlled dimensions are fabricated in batches for nanoelectromechanical system (NEMS). All-single-crystal diamond NEM switches are demonstrated using these nanowires with high reproducibility, high controllability, repeated switching, and no sitction. Diamond switches not only overcome the stiction and abrasion problems in existing electromechanical switches, but also circumvent the shallow doping problem.
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