Local Doping of Silicon Using Nanoimprint Lithography and Molecular Monolayers
Article first published online: 9 FEB 2011
Copyright © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Volume 23, Issue 11, pages 1346–1350, March 18, 2011
How to Cite
Voorthuijzen, W. P., Yilmaz, M. D., Naber, W. J. M., Huskens, J. and van der Wiel, W. G. (2011), Local Doping of Silicon Using Nanoimprint Lithography and Molecular Monolayers. Adv. Mater., 23: 1346–1350. doi: 10.1002/adma.201003625
- Issue published online: 14 MAR 2011
- Article first published online: 9 FEB 2011
- Manuscript Revised: 12 NOV 2010
- Manuscript Received: 4 OCT 2010
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