Advanced Materials

Templated Solid-State Dewetting to Controllably Produce Complex Patterns

Authors

  • Jongpil Ye,

    1. Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA
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  • Carl V. Thompson

    Corresponding author
    1. Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA
    • Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA.
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Abstract

Templated formation of complex patterns via solid-state dewetting is demonstrated. Thin films often dewet from their substrates when they are heated, even while remaining in the solid state throughout the process. It is shown that solid-state dewetting of epitaxial films can be templated through lithographic pre-patterning, so as to reproducibly form complex structures with sub lithographic feature sizes.

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