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Reinforced Self-Assembled Nanodielectrics for High-Performance Transparent Thin Film Transistors

Authors

  • Jun Liu,

    1. Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208, USA
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  • Jonathan W. Hennek,

    1. Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208, USA
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  • D. Bruce Buchholz,

    1. Department of Materials Science and Engineering and the Materials Research Center, Northwestern University, 2220 Campus Drive, Evanston, IL 60208, USA
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  • Young-geun Ha,

    1. Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208, USA
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  • Sujing Xie,

    1. Department of Materials Science and Engineering and the Materials Research Center, Northwestern University, 2220 Campus Drive, Evanston, IL 60208, USA
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  • Vinayak P. Dravid,

    Corresponding author
    1. Department of Materials Science and Engineering and the Materials Research Center, Northwestern University, 2220 Campus Drive, Evanston, IL 60208, USA
    • Department of Materials Science and Engineering and the Materials Research Center, Northwestern University, 2220 Campus Drive, Evanston, IL 60208, USA.
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  • Robert P. H. Chang,

    Corresponding author
    1. Department of Materials Science and Engineering and the Materials Research Center, Northwestern University, 2220 Campus Drive, Evanston, IL 60208, USA
    • Department of Materials Science and Engineering and the Materials Research Center, Northwestern University, 2220 Campus Drive, Evanston, IL 60208, USA.
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  • Antonio Facchetti,

    Corresponding author
    1. Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208, USA
    • Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208, USA
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  • Tobin J. Marks

    Corresponding author
    1. Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208, USA
    • Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208, USA
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Abstract

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Reinforced self-assembled nano-dielectrics (R-SANDs) are fabricated by depositing a thin protective layer on high-capacitance SAND films, thus significantly improving SAND durability and expanding SAND compatibility with a broader range of semiconductor deposition techniques. Fully transparent TFTs with excellent field-effect mobilities ∼140 cm2/V·s and low operating voltages ∼1.0 V are demonstrated by combining the R-SAND and an amorphous Zn-In-Sn-O transparent oxide semiconductor.

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