Metamaterials: Micrometer-Scale Cubic Unit Cell 3D Metamaterial Layers (Adv. Mater. 44/2010)

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Abstract

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Membrane projection lithography is used to deposit split ring resonator structures (SRRs) on the interior faces of a cubic SU-8 cavity in work reported by Bruce Burckel and co-workers on p. 5053. The arrows in the inset schematic diagram show three of the five evaporation directions, while the SEM image shows the resulting metamaterial layers with SRRs on each of the five interior faces of the 6-μm cubic unit cell.

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