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Conductive Atomic Force Microscope Nanopatterning of Epitaxial Graphene on SiC(0001) in Ambient Conditions

Authors

  • Justice M. P. Alaboson,

    1. Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, IL 60208, USA
    2. Materials Science Division, Argonne National Laboratory, 9700 S. Cass Avenue, Argonne, IL 60439, USA
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  • Qing Hua Wang,

    1. Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, IL 60208, USA
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  • Joshua A. Kellar,

    1. Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, IL 60208, USA
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  • Joohee Park,

    1. Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, IL 60208, USA
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  • Jeffrey W. Elam,

    1. Energy Systems Division, Argonne National Laboratory, 9700 S. Cass Avenue, Argonne, IL 60439, USA
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  • Michael J. Pellin,

    1. Materials Science Division, Argonne National Laboratory, 9700 S. Cass Avenue, Argonne, IL 60439, USA
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  • Mark C. Hersam

    Corresponding author
    1. Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, IL 60208, USA
    • Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, IL 60208, USA.
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Abstract

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Conductive atomic force microscope (cAFM) nanopatterning is demonstrated on epitaxial graphene on SiC (0001) under ambient conditions. Nanopatterning kinetics and chemistry suggest that ambient cAFM nanopatterning induces local oxidization with the surface, interface, and bulk layers of epitaxial graphene on SiC (0001) playing distinct roles in the depth profile of the final nanopatterned structure.

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