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Aligned Carbon Nanotube Arrays for Degradation-Resistant, Intimate Contact in Micromechanical Devices



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A highly reliable micromechanical contact based on aligned carbon nanotube (CNT) arrays is demonstrated and characterized. The CNT arrays are synthesized directly on three-terminal microelectromechanical systems, and they are adjusted and simultaneously preloaded during the synthetic process, making intimate micromechanical contacts. It is found that the CNT array-to-array contact improves upon conventional solid-to-solid micromechanical contact.