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Keywords:

  • nanomanufacturing;
  • thermochemical nanolithography;
  • ferroelectric materials;
  • piezoelectric materials
Thumbnail image of graphical abstract

A complementary metal–oxide–semico­nductor (CMOS)-compatible method for the direct fabrication of arbitrary-shaped Pb(Zr0.52Ti0.48)O3and PbTiO3 ferroelectric/piezoelectric nanostructures on plastic, silicon, and soda-lime glass substrates is reported. Thermochemical nanolithography is used to induce nanoscale crystallization of sol-gel precursor films. Ferroelectric lines with width ≥30 nm, spheres with diameter ≥10 nm, and densities up to 213 Gb in−2 are produced.