Communication

Direct Fabrication of Arbitrary-Shaped Ferroelectric Nanostructures on Plastic, Glass, and Silicon Substrates

  1. Suenne Kim1,*,
  2. Yaser Bastani2,
  3. Haidong Lu3,
  4. William P. King4,
  5. Seth Marder5,6,
  6. Kenneth H. Sandhage5,6,
  7. Alexei Gruverman3,
  8. Elisa Riedo1,
  9. Nazanin Bassiri-Gharb2,*

Article first published online: 15 JUL 2011

DOI: 10.1002/adma.201101991

Issue

Advanced Materials

Advanced Materials

Volume 23, Issue 33, pages 3786–3790, September 1, 2011

Additional Information

How to Cite

Kim, S., Bastani, Y., Lu, H., King, W. P., Marder, S., Sandhage, K. H., Gruverman, A., Riedo, E. and Bassiri-Gharb, N. (2011), Direct Fabrication of Arbitrary-Shaped Ferroelectric Nanostructures on Plastic, Glass, and Silicon Substrates. Adv. Mater., 23: 3786–3790. doi: 10.1002/adma.201101991

Author Information

  1. 1

    School of Physics, Georgia Institute of Technology, Atlanta, GA 30332, USA

  2. 2

    G. W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332, USA

  3. 3

    Department of Physics and Astronomy, University of Nebraska-Lincoln, Lincoln, NE 68588, USA

  4. 4

    Department of Mechanical Science and Engineering, University of Illinois Urbana-Champaign, Urbana, IL 61801, USA

  5. 5

    School of Chemistry and Biochemistry, Georgia Institute of Technology, Atlanta, GA 30332, USA

  6. 6

    School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA 30332, USA

*School of Physics, Georgia Institute of Technology, Atlanta, GA 30332, USA

Publication History

  1. Issue published online: 24 AUG 2011
  2. Article first published online: 15 JUL 2011
  3. Manuscript Received: 27 MAY 2011

SEARCH

SEARCH BY CITATION

ARTICLE TOOLS

View Full Article with Supporting Information (HTML) Get PDF (2090K)

Keywords:

  • nanomanufacturing;
  • thermochemical nanolithography;
  • ferroelectric materials;
  • piezoelectric materials
Thumbnail image of graphical abstract

A complementary metal–oxide–semico­nductor (CMOS)-compatible method for the direct fabrication of arbitrary-shaped Pb(Zr0.52Ti0.48)O3and PbTiO3 ferroelectric/piezoelectric nanostructures on plastic, silicon, and soda-lime glass substrates is reported. Thermochemical nanolithography is used to induce nanoscale crystallization of sol-gel precursor films. Ferroelectric lines with width ≥30 nm, spheres with diameter ≥10 nm, and densities up to 213 Gb in−2 are produced.

View Full Article with Supporting Information (HTML) Get PDF (2090K)