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Integrated Carbon Nanotube Array as Dry Adhesive for High-Temperature Silicon Processing



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CNT arrays are used as removable dry adhesives for high-temperature processes with temperatures that increase by as much as 900 °C. The adhesion force between the self-assembled CNTs is utilized to strain the microstructures in high-temperature environments. Arrays of analog micromirrors are successfully fabricated by silicon processing. The proposed method significantly simplifies the fabrication process.