Integrated Carbon Nanotube Array as Dry Adhesive for High-Temperature Silicon Processing
Article first published online: 16 AUG 2011
Copyright © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Volume 23, Issue 37, pages 4285–4289, October 4, 2011
How to Cite
Eun, Y., Lee, J.-I., Choi, J., Song, Y. and Kim, J. (2011), Integrated Carbon Nanotube Array as Dry Adhesive for High-Temperature Silicon Processing. Adv. Mater., 23: 4285–4289. doi: 10.1002/adma.201102331
- Issue published online: 28 SEP 2011
- Article first published online: 16 AUG 2011
- Manuscript Revised: 20 JUL 2011
- Manuscript Received: 20 JUN 2011
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