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Keywords:

  • flexible plasmonics;
  • stretchable metamaterials;
  • polymer substrates;
  • nanofabrication;
  • stencil lithography
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Flexible plasmonics and metamaterials on polymeric and nonplanar substrates are demonstrated using nanostencil lithography. High-resolution fabrication with 10 nm accuracy is achieved at high throughput and low cost in a single fabrication step. Optical tuning is shown with mechanical stretching of the polymer substrate. Patterning of nanostructures on curved surfaces, including optical fibers, is demonstrated.