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Keywords:

  • silicon nitride;
  • thermal conductivity;
  • ceramics;
  • fracture toughness;
  • nitridation
Thumbnail image of graphical abstract

A silicon nitride ceramic is prepared by a modified sintering of reaction bonded silicon nitride method (SRBSN). This ceramic has a very high thermal conductivity, high fracture toughness, and a high strength. It is expected to be used as the next-generation insulating substrate material for high-power electronic devices and other new applications.