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Keywords:

  • batteries;
  • silicon;
  • atomic layer deposition;
  • thin films;
  • coulombic efficiency
Thumbnail image of graphical abstract

A patterned silicon electrode as the anode of lithium ion batteries is fabricated by microfabrication technology. An ultrathin alumina layer is coated on the patterned electrode by atomic layer deposition (ALD). This results in obviously enhanced coulombic efficiency and cycling performance.