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Advanced Materials

Chiral Nematic Fluids as Masks for Lithography

Authors

  • Hyeon Su Jeong,

    1. Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology, Daejeon 305-701, Korea
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  • Yun Ho Kim,

    1. Information and Electronics Polymer Research Center, Korea Research Institution of Chemical Technology, 141 Gajeong-ro, Yuseong-gu, Daejeon, 305-600, Korea
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  • Ji Sun Lee,

    1. Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology, Daejeon 305-701, Korea
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  • Jung Hyun Kim,

    1. Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology, Daejeon 305-701, Korea
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  • Mohan Srinivasarao,

    Corresponding author
    1. School of Materials Science and Engineering, School of Chemistry and Biochemistry, Center for Advanced Research on Optical Microscopy (CAROM), Georgia Institute of Technology, Atlanta, Georgia 30332, USA
    • Mohan Srinivasarao, School of Materials Science and Engineering, School of Chemistry and Biochemistry, Center for Advanced Research on Optical Microscopy (CAROM), Georgia Institute of Technology, Atlanta, Georgia 30332, USA.

      Hee-Tae Jung, Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology, Daejeon 305-701, Korea

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  • Hee-Tae Jung

    Corresponding author
    1. Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology, Daejeon 305-701, Korea
    • Mohan Srinivasarao, School of Materials Science and Engineering, School of Chemistry and Biochemistry, Center for Advanced Research on Optical Microscopy (CAROM), Georgia Institute of Technology, Atlanta, Georgia 30332, USA.

      Hee-Tae Jung, Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology, Daejeon 305-701, Korea

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Abstract

A lithographic scheme is reported that uses a cholesteric liquid crystal with its helical axis in the plane of the sample as a “mask” for imprinting patterns in a photoresist over a large area. On the application of an electric field the cholesteric liquid crystals produce a texture that acts as a lattice of cylindrical lenses for one polarization of a light beam. This is used in photolithography to create parallel lines over large areas.

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