Communication

Synthesis of Large-Area MoS2 Atomic Layers with Chemical Vapor Deposition

  1. Yi-Hsien Lee1,†,
  2. Xin-Quan Zhang3,†,
  3. Wenjing Zhang1,
  4. Mu-Tung Chang2,
  5. Cheng-Te Lin1,
  6. Kai-Di Chang3,
  7. Ya-Chu Yu3,
  8. Jacob Tse-Wei Wang1,
  9. Chia-Seng Chang2,
  10. Lain-Jong Li1,*,
  11. Tsung-Wu Lin3,*

Article first published online: 30 MAR 2012

DOI: 10.1002/adma.201104798

Issue

Advanced Materials

Advanced Materials

Volume 24, Issue 17, pages 2320–2325, May 2, 2012

Additional Information

How to Cite

Lee, Y.-H., Zhang, X.-Q., Zhang, W., Chang, M.-T., Lin, C.-T., Chang, K.-D., Yu, Y.-C., Wang, J. T.-W., Chang, C.-S., Li, L.-J. and Lin, T.-W. (2012), Synthesis of Large-Area MoS2 Atomic Layers with Chemical Vapor Deposition. Adv. Mater., 24: 2320–2325. doi: 10.1002/adma.201104798

Author Information

  1. 1

    Institute of Atomic and Molecular Sciences, Academia Sinica, No. 1, Roosevelt Rd., Sec. 4, Taipei, 10617, Taiwan, Fax:(+886) 223620200

  2. 2

    Institute of Physics, Academia Sinica, 128 Sec. 2, Academia Rd., Nankang, Taipei 11529, Taiwan

  3. 3

    Department of Chemistry, Tunghai University, No. 181, Sec. 3, Taichung Port Rd., Taichung City 40704, Taiwan, Fax: (+886) 423596233

  1. †

    These authors contributed equally.

*Institute of Atomic and Molecular Sciences, Academia Sinica, No. 1, Roosevelt Rd., Sec. 4, Taipei, 10617, Taiwan, Fax:(+886) 223620200

Publication History

  1. Issue published online: 23 APR 2012
  2. Article first published online: 30 MAR 2012
  3. Manuscript Revised: 30 JAN 2012
  4. Manuscript Received: 15 DEC 2011

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Keywords:

  • molybdenum disulfide;
  • layered materials;
  • field-effect transistors;
  • chemical vapor deposition
Thumbnail image of graphical abstract

Large-area MoS2 atomic layers are synthesized on SiO2 substrates by chemical vapor deposition using MoO3 and S powders as the reactants. Optical, microscopic and electrical measurements suggest that the synthetic process leads to the growth of MoS2 monolayer. The TEM images verify that the synthesized MoS2 sheets are highly crystalline.

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