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Advanced Materials

Directional Photofluidization Lithography: Micro/Nanostructural Evolution by Photofluidic Motions of Azobenzene Materials

Authors

  • Seungwoo Lee,

    Corresponding author
    1. Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 305-701, Korea
    2. Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 305-701, Korea
    • Seungwoo Lee, Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 305-701, Korea===

      Jung-Ki Park, Graduate School of EEWS, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 305-701, Korea.===

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  • Hong Suk Kang,

    1. Graduate School of EEWS, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 305-701, Korea
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  • Jung-Ki Park

    Corresponding author
    1. Graduate School of EEWS, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 305-701, Korea
    2. Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 305-701, Korea
    • Seungwoo Lee, Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 305-701, Korea===

      Jung-Ki Park, Graduate School of EEWS, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 305-701, Korea.===

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Abstract

This review demonstrates directional photofluidization lithography (DPL), which makes it possible to fabricate a generic and sophisticated micro/nanoarchitecture that would be difficult or impossible to attain with other methods. In particular, DPL differs from many of the existing micro/nanofabrication methods in that the post-treatment (i.e., photofluidization), after the preliminary fabrication process of the original micro/nanostructures, plays a pivotal role in the various micro/nanostructural evolutions including the deterministic reshaping of architectures, the reduction of structural roughness, and the dramatic enhancement of pattern resolution. Also, DPL techniques are directly compatible with a parallel and scalable micro/nanofabrication. Thus, DPL with such extraordinary advantages in micro/nanofabrication could provide compelling opportunities for basic micro/nanoscale science as well as for general technology applications.

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