Nanomanufacturing: Direct Fabrication of Arbitrary-Shaped Ferroelectric Nanostructures on Plastic, Glass, and Silicon Substrates (Adv. Mater. 33/2011)



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On page 3786 Suenne Kim, Nazanin Bassiri-Gharb, and co-workers report on the use of thermochemical nanolithography for direct and complimentary metal–oxide–semiconductor (CMOS)-compatible fabrication of perovskite-based ferroelectric materials. Such nanostructured piezoelectric materials are highly attractive for a variety of applications, including miniaturized energy harvesting devices, piezoelectric sensors, actuators, and transducers, as well as pyroelectric sensors and memory devices.