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Air-Bridged Ohmic Contact on Vertically Aligned Si Nanowire Arrays: Application to Molecule Sensors

Authors

  • Hee Han,

    1. Korea Research institute of Standards and Science (KRISS), Yuseong, 305-340 Daejeon, Korea
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  • Jungkil Kim,

    1. Korea Research institute of Standards and Science (KRISS), Yuseong, 305-340 Daejeon, Korea
    2. University of Science and Technology (UST), Yuseong, 305-333 Daejeon, Korea
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  • Ho Sun Shin,

    1. Korea Research institute of Standards and Science (KRISS), Yuseong, 305-340 Daejeon, Korea
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  • Jae Yong Song,

    1. Korea Research institute of Standards and Science (KRISS), Yuseong, 305-340 Daejeon, Korea
    2. University of Science and Technology (UST), Yuseong, 305-333 Daejeon, Korea
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  • Woo Lee

    Corresponding author
    1. Korea Research institute of Standards and Science (KRISS), Yuseong, 305-340 Daejeon, Korea
    2. University of Science and Technology (UST), Yuseong, 305-333 Daejeon, Korea
    • Korea Research institute of Standards and Science (KRISS), Yuseong, 305-340 Daejeon, Korea.
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Abstract

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A simple, cost-effective, and highly reliable method for constructing an air-bridged electrical contact on large arrays of vertically aligned nanowires was developed. The present method may open up new opportunities for developing advanced nanowire-based devices for energy harvest and storage, power generation, and sensing applications.

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