A Novel Self-Ordered Sub-10 nm Nanopore Template for Nanotechnology


  • This work is dedicated to the late Ulrich Gösele, former director at the MPI of Microstructure Physics, Halle, Germany, who introduced us to the beauty and usefulness of AAO membranes


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The fabrication of cost-efficient wafer scale self-ordered arrays of vertical and insulating sub-10 nm nanopores with low porosity is demonstrated. These meet challenging applications like read heads with perpendicular to the plane giant magnetoresistance, calling for strongly localized currents. Purely electrical sequencing of DNA strands, requiring insulating membranes with reduced pore diameters can also be considered.