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Advanced Materials

Use of a Columnar Metal Thin Film as a Nanosieve with Sub-10 nm Pores

Authors

  • Dong-Hoon Choi,

    1. Department of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 305-701, Republic of Korea
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  • Yong Duk Han,

    1. Department of Molecular Science and Technology, Ajou University, San 5, Woncheon-dong, Yeongtong-gu, Suwon, 443-749, Republic of Korea
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  • Byung-Kee Lee,

    1. Department of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 305-701, Republic of Korea
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  • Seon-Jin Choi,

    1. Department of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 305-701, Republic of Korea
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  • Hyun C. Yoon,

    1. Department of Molecular Science and Technology, Ajou University, San 5, Woncheon-dong, Yeongtong-gu, Suwon, 443-749, Republic of Korea
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  • Dae-Sik Lee,

    Corresponding author
    1. IT Convergence Components Laboratory, Electronics and Telecommunications Research Institute (ETRI), 138 Gajeongno, Yuseong-gu, Daejeon, 305-700, Republic of Korea
    • IT Convergence Components Laboratory, Electronics and Telecommunications Research Institute (ETRI), 138 Gajeongno, Yuseong-gu, Daejeon, 305-700, Republic of Korea.
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  • Jun-Bo Yoon

    Corresponding author
    1. Department of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 305-701, Republic of Korea
    • Department of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon, 305-701, Republic of Korea
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Abstract

A columnar-structured nanosieve is unique in the sense that it is a general thin film formed by physical vapor deposition (PVD). Instead of additional processes to make nanopores, the numerous voids naturally formed among columnar grains during PVD are used as nanopores. Since the thin film formed by PVD has vertically grown columnar grains, the fabricated nanosieve has numerous straight-opened nanopores, which is an ideal structure for a nanosieve.

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