Tailored Star Block Copolymer Architecture for High Performance Chemically Amplified Resists
Article first published online: 7 SEP 2012
Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Volume 24, Issue 44, pages 5939–5944, November 20, 2012
How to Cite
Wieberger, F., Neuber, C., Ober, C. K. and Schmidt, H.-W. (2012), Tailored Star Block Copolymer Architecture for High Performance Chemically Amplified Resists. Adv. Mater., 24: 5939–5944. doi: 10.1002/adma.201201547
- Issue published online: 20 NOV 2012
- Article first published online: 7 SEP 2012
- Manuscript Revised: 26 JUL 2012
- Manuscript Received: 18 APR 2012
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