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Advanced Materials

Large-Area Fabrication of Periodic Sub-15 nm-Width Single-Layer Graphene Nanorings

Authors

  • Yusin Pak,

    1. School of Materials Science and Engineering, Gwangju Institute of Science and Technology (GIST), 261 Cheomdan-gwagiro, Buk-gu, Gwangju 500-712, Republic of Korea
    Current affiliation:
    1. These authors contributed equally to this work.
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  • Huisu Jeong,

    1. School of Materials Science and Engineering, Gwangju Institute of Science and Technology (GIST), 261 Cheomdan-gwagiro, Buk-gu, Gwangju 500-712, Republic of Korea
    Current affiliation:
    1. These authors contributed equally to this work.
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  • Kwang-Ho Lee,

    1. School of Materials Science and Engineering, Gwangju Institute of Science and Technology (GIST), 261 Cheomdan-gwagiro, Buk-gu, Gwangju 500-712, Republic of Korea
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  • Hui Song,

    1. School of Materials Science and Engineering, Gwangju Institute of Science and Technology (GIST), 261 Cheomdan-gwagiro, Buk-gu, Gwangju 500-712, Republic of Korea
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  • Taehyeon Kwon,

    1. Department of Nano-biomaterials and Electronics, Gwangju Institute of Science and Technology (GIST), 261 Cheomdan-gwagiro, Buk-gu, Gwangju 500-712, Republic of Korea
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  • Jungsu Park,

    1. Advanced Photonics Research Institute, Gwangju Institute of Science and Technology (GIST), 261 Cheomdan-gwagiro, Buk-gu, Gwangju 500-712, Republic of Korea
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  • Woojin Park,

    1. School of Materials Science and Engineering, Gwangju Institute of Science and Technology (GIST), 261 Cheomdan-gwagiro, Buk-gu, Gwangju 500-712, Republic of Korea
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  • Mun-Seok Jeong,

    1. Advanced Photonics Research Institute, Gwangju Institute of Science and Technology (GIST), 261 Cheomdan-gwagiro, Buk-gu, Gwangju 500-712, Republic of Korea
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  • Takhee Lee,

    1. Department of Physics and Astronomy, Seoul National University, 599 Kwan-Ak Ro, Kwan-Ak gu, Seoul 151-747, Republic of Korea
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  • Sunae Seo,

    Corresponding author
    1. Department of Physics and Graphene Research Institute, Sejong University, 98 Gunja-dong, Kwanggin-gu, Seoul 143-747, Republic of Korea
    • Department of Physics and Graphene Research Institute, Sejong University, 98 Gunja-dong, Kwanggin-gu, Seoul 143-747, Republic of Korea.
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  • Gun-Young Jung

    Corresponding author
    1. School of Materials Science and Engineering, Gwangju Institute of Science and Technology (GIST), 261 Cheomdan-gwagiro, Buk-gu, Gwangju 500-712, Republic of Korea
    2. Department of Nano-biomaterials and Electronics, Gwangju Institute of Science and Technology (GIST), 261 Cheomdan-gwagiro, Buk-gu, Gwangju 500-712, Republic of Korea
    • School of Materials Science and Engineering, Gwangju Institute of Science and Technology (GIST), 261 Cheomdan-gwagiro, Buk-gu, Gwangju 500-712, Republic of Korea
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Abstract

A periodically aligned array of graphene nanorings (GRNRs) with a sub-15 nm linewidth at a pitch of 450 nm is fabricated with a large area, 9 cm2, through conventional nanoimprint lithography coupled with sophisticated metal deposition and plasma-etching processes. The existence of the single-layer GRNRs is verified by various techniques.

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