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Keywords:

  • carbon nanotubes;
  • catalyst-free growth;
  • plasmas;
  • nucleation;
  • sensors
Thumbnail image of graphical abstract

Low-temperature plasmas in direct contact with arbitrary, written linear features on a Si wafer enable catalyst-free integration of carbon nanotubes into a Si-based nanodevice platform and in situ resolution of individual nucleation events. The graded nanotube arrays show reliable, reproducible, and competitive performance in electron field emission and biosensing nanodevices.