Plasma-Enabled Graded Nanotube Biosensing Arrays on a Si Nanodevice Platform: Catalyst-Free Integration and In Situ Detection of Nucleation Events

Authors

  • Shailesh Kumar,

    1. Plasma Nanoscience Centre Australia (PNCA), CSIRO Materials Science and Engineering, P.O. Box 218, Lindfield, NSW 2070, Australia
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  • Hamid Mehdipour,

    1. Plasma Nanoscience Centre Australia (PNCA), CSIRO Materials Science and Engineering, P.O. Box 218, Lindfield, NSW 2070, Australia
    2. Plasma Nanoscience @ Complex Systems, School of Physics, University of Sydney, NSW 2006, Australia
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  • Kostya (Ken) Ostrikov

    Corresponding author
    1. Plasma Nanoscience Centre Australia (PNCA), CSIRO Materials Science and Engineering, P.O. Box 218, Lindfield, NSW 2070, Australia
    2. Plasma Nanoscience @ Complex Systems, School of Physics, University of Sydney, NSW 2006, Australia
    • Plasma Nanoscience Centre Australia (PNCA), CSIRO Materials Science and Engineering, P.O. Box 218, Lindfield, NSW 2070, Australia.
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Abstract

original image

Low-temperature plasmas in direct contact with arbitrary, written linear features on a Si wafer enable catalyst-free integration of carbon nanotubes into a Si-based nanodevice platform and in situ resolution of individual nucleation events. The graded nanotube arrays show reliable, reproducible, and competitive performance in electron field emission and biosensing nanodevices.

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