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Advanced Materials

Hybrid High-Resolution Three-Dimensional Nanofabrication for Metamaterials and Nanoplasmonics

Authors

  • Isabelle Staude,

    Corresponding author
    1. Nonlinear Physics Centre and Centre for Ultra-high bandwidth Devices for Optical Systems (CUDOS), Research School of Physics and Engineering, The Australian National University, Canberra ACT 0200, Australia
    • Nonlinear Physics Centre and Centre for Ultra-high bandwidth Devices for Optical Systems (CUDOS), Research School of Physics and Engineering, The Australian National University, Canberra ACT 0200, Australia.
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  • Manuel Decker,

    1. Nonlinear Physics Centre and Centre for Ultra-high bandwidth Devices for Optical Systems (CUDOS), Research School of Physics and Engineering, The Australian National University, Canberra ACT 0200, Australia
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  • Michael J. Ventura,

    1. Centre for Micro-Photonics and Centre for Ultra-high bandwidth Devices for Optical Systems (CUDOS), Faculty of Engineering and Industrial Sciences, Swinburne University of Technology, Hawthorn, Victoria, Australia
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  • Chennupati Jagadish,

    1. Department of Electronic Materials Engineering, Research School of Physics and Engineering, The Australian National University, Canberra ACT 0200, Australia
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  • Dragomir N. Neshev,

    1. Nonlinear Physics Centre and Centre for Ultra-high bandwidth Devices for Optical Systems (CUDOS), Research School of Physics and Engineering, The Australian National University, Canberra ACT 0200, Australia
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  • Min Gu,

    1. Centre for Micro-Photonics and Centre for Ultra-high bandwidth Devices for Optical Systems (CUDOS), Faculty of Engineering and Industrial Sciences, Swinburne University of Technology, Hawthorn, Victoria, Australia
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  • Yuri S. Kivshar

    1. Nonlinear Physics Centre and Centre for Ultra-high bandwidth Devices for Optical Systems (CUDOS), Research School of Physics and Engineering, The Australian National University, Canberra ACT 0200, Australia
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Abstract

We propose a novel hybrid fabrication approach that combines direct laser writing with a subsequent electron-beam lithography step. This approach allows realizing out-of-plane plasmonic nanostructures with truly nanoscopic feature sizes. The excellent quality of the obtained structures is evidenced by optical characterization of upright-standing split-ring resonator arrays fabricated along these lines.

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