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Polymerization Inhibition by Triplet State Absorption for Nanoscale Lithography

Benjamin Harke^1,*,
William Dallari^1,3,
Giulia Grancini²,
Daniele Fazzi²,
Fernando Brandi¹,
Annamaria Petrozza^2,*,
Alberto Diaspro^1,3

Article first published online: 9 JAN 2013

DOI: 10.1002/adma.201204141

Issue

Advanced Materials

Volume 25, Issue 6, pages 904–909, February 13, 2013

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How to Cite

Harke, B., Dallari, W., Grancini, G., Fazzi, D., Brandi, F., Petrozza, A. and Diaspro, A. (2013), Polymerization Inhibition by Triplet State Absorption for Nanoscale Lithography. Adv. Mater., 25: 904–909. doi: 10.1002/adma.201204141

Author Information

¹
Department of Nanophysics, Istituto Italiano di Tecnologia (IIT), Via Morego 30, 16163 Genova, Italy
²
Center for Nano Science and Technology@PoliMi, Istituto Italiano di Tecnologia (IIT), Via Giovanni Pascoli 70/3, 20133 Milano, Italy
³
Dipatimento di Fisica, Universita' degli Studi di Genova, via Dodecaneso 13, 16153, Genova, Italy

Email: Benjamin Harke (benjamin.harke@iit.it), Annamaria Petrozza (annamaria.petrozza@iit.it)

^*Department of Nanophysics, Istituto Italiano di Tecnologia (IIT), Via Morego 30, 16163 Genova, Italy

Publication History

Issue published online: 7 FEB 2013
Article first published online: 9 JAN 2013
Manuscript Revised: 5 NOV 2012
Manuscript Received: 3 OCT 2012

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