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Keywords:

  • Lamb wave resonator;
  • aluminum nitride;
  • cubic silicon carbide;
  • high quality factor;
  • piezoelectric thin film;
  • high-order Lamb wave modes
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An AlN/3C–SiC composite is used to realize high-frequency and high-Q acoustic wave resonators by exploiting the third-order quasi-symmetric (QS3) Lamb wavemode, as described by C.-M. Lin, Y.-Y. Chen, and co-workers on page 2722. The epitaxial 3C–SiC layer enhances the electromechanical coupling of the QS3 mode and boosts the Q due to the intrinsic low acoustic loss of SiC crystals. This AlN/3C–SiC composite plate structure enables production of high-performance micromechanical acoustic wave resonators for frequency control and sensing applications.