Microlens Arrays: Fabrication of Microlens Arrays with Well-controlled Curvature by Liquid Trapping and Electrohydrodynamic Deformation in Microholes (Adv. Mater. 23/2012)

Authors

  • Xiangming Li,

    1. State Key Laboratory for Manufacturing, Systems Engineering, Xi'an Jiaotong University, 28 Xianning Road, Xi'an, 710049, P. R. China
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  • Yucheng Ding,

    Corresponding author
    1. State Key Laboratory for Manufacturing, Systems Engineering, Xi'an Jiaotong University, 28 Xianning Road, Xi'an, 710049, P. R. China
    • State Key Laboratory for Manufacturing, Systems Engineering, Xi'an Jiaotong University, 28 Xianning Road, Xi'an, 710049, P. R. China.
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  • Jinyou Shao,

    Corresponding author
    1. State Key Laboratory for Manufacturing, Systems Engineering, Xi'an Jiaotong University, 28 Xianning Road, Xi'an, 710049, P. R. China
    • State Key Laboratory for Manufacturing, Systems Engineering, Xi'an Jiaotong University, 28 Xianning Road, Xi'an, 710049, P. R. China.
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  • Hongmiao Tian,

    1. State Key Laboratory for Manufacturing, Systems Engineering, Xi'an Jiaotong University, 28 Xianning Road, Xi'an, 710049, P. R. China
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  • Hongzhong Liu

    1. State Key Laboratory for Manufacturing, Systems Engineering, Xi'an Jiaotong University, 28 Xianning Road, Xi'an, 710049, P. R. China
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Abstract

original image

Y. C. Ding, J. Y. Shao, and co-workers demonstrate a creative and economic method for manufacturing large-area microlens arrays (MLAs) with controllable curvature and supersmooth surfaces. On page OP 165, the production of a concave MLA is achieved by electrohydrodynamically deforming the surface of a photocurable prepolymer trapped in microhole array which has been etched onto a doped silicon wafer. The concave MLA is then used as a master to generate the convex MLA via vacuum micromoulding.

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