Flexible piezotronic devices based on RF-sputtered piezoelectric semiconductor thin films have been investigated for the first time. The dominating role of the piezotronic effect over the geometrical and piezoresistive effect in the as-fabricated devices has been confirmed and the modulation effect of the piezopotential on charge carrier transport under different strains is subsequently studied. Moreover, it is also demonstrated that the UV sensing capability of the as-fabricated thin film based piezotronic device can be tuned by the piezopotential, showing significantly enhanced sensitivity and improved reset time under tensile strain.
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