Get access
Advanced Materials

Highly Conductive SrVO3 as a Bottom Electrode for Functional Perovskite Oxides

Authors

  • Jarrett A. Moyer,

    1. Department of Physics, Pennsylvania State University, University Park, PA 16802, USA
    Current affiliation:
    1. Department of Physics, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA
    Search for more papers by this author
  • Craig Eaton,

    1. Department of Materials Science and Engineering and Materials Research Institute, Pennsylvania State University, University Park, PA 16802, USA
    Search for more papers by this author
  • Roman Engel-Herbert

    Corresponding author
    1. Department of Materials Science and Engineering and Materials Research Institute, Pennsylvania State University, University Park, PA 16802, USA
    • Department of Materials Science and Engineering and Materials Research Institute, Pennsylvania State University, University Park, PA 16802, USA.
    Search for more papers by this author

Abstract

Stoichiometric SrVO3 thin films grown by hybrid molecular beam epitaxy are demonstrated, meeting the stringent requirements of an ideal bottom electrode material. They display an order of magnitude lower room temperature resistivity and superior chemical stability, compared to the commonly employed SrRuO3, as well as atomically smooth surfaces. Excellent structural compatibility with perovskite and related structures renders SrVO3 a high performance electrode material with the potential to promote the creation of new functional oxide electronic devices.

original image
Get access to the full text of this article

Ancillary