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Keywords:

  • metal/oxide interfaces;
  • ohmic contacts;
  • scanning transmission electron microscopy;
  • x-ray and ultraviolet photoemission;
  • first-principles modeling
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Heteroepitaxial growth of Cr metal on Nb-doped SrTiO3(001) is accompanied by Cr diffusion to interstitial sites within the first few atomic planes, an anchoring of the Cr film to the substrate, charge transfer from Cr to Ti, and metallization of the near-surface region, as depicted in the figure. The contact resistance of the resulting interface is exceedingly low.