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Facile Fabrication of Single-Crystal-Diamond Nanostructures with Ultrahigh Aspect Ratio

Authors

  • Ye Tao,

    1. Department of Physics, ETH Zurich, Schafmattstrasse 16, 8093 Zurich, Switzerland, Phone: +41 44 633 23 36; Fax: +41 44 633 10 56
    2. Department of Chemistry, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge MA 02139, USA
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  • Christian Degen

    Corresponding author
    1. Department of Physics, ETH Zurich, Schafmattstrasse 16, 8093 Zurich, Switzerland, Phone: +41 44 633 23 36; Fax: +41 44 633 10 56
    • Department of Physics, ETH Zurich, Schafmattstrasse 16, 8093 Zurich, Switzerland, Phone: +41 44 633 23 36; Fax: +41 44 633 10 56.
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Abstract

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A robust and facile approach for making single-crystal-diamond MEMS and NEMS devices is presented. The approach relies entirely on commercial diamond material and standard cleanroom processes. As an example, batch fabrication of cantilever beams of thickness down to 45 nm and aspect ratios exceeding 2000:1 is demonstrated.

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