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Keywords:

  • wet etching;
  • semipolar GaN planes;
  • light emitting diodes;
  • ohmic contacts;
  • extraction efficiencies
Thumbnail image of graphical abstract

Spotlight on etching: (11-22) semipolar GaN plane light-emitting diodes (LEDs) are demonstrated using a wet-etching process. A trigonal prism cell structure with a (0001) c plane and nnn{10-10} m planes is formed after KOH wet etching, and leads to a better ohmic contact and enhanced light extraction. LEDs fabricated by wet etching show excellent output performance 1.89 times higher than that of the reference LEDs.