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Advanced Materials

Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient

Authors

  • Jonathan P. Singer,

    1. Department of Materials Science and Engineering, Institute for Soldier Nanotechnologies, Massachusetts Institute of Technology, Cambridge, MA, USA
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    • These authors contributed equally to this work.

  • Pao-Tai Lin,

    1. Department of Materials Science and Engineering, Materials Processing Center, Massachusetts Institute of Technology, Cambridge, MA, USA
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    • These authors contributed equally to this work.

  • Steven E. Kooi,

    1. Department of Materials Science and Engineering, Institute for Soldier Nanotechnologies, Massachusetts Institute of Technology, Cambridge, MA, USA
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  • Lionel C. Kimerling,

    1. Department of Materials Science and Engineering, Materials Processing Center, Massachusetts Institute of Technology, Cambridge, MA, USA
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  • Jurgen Michel,

    1. Materials Processing Center, Massachusetts Institute of Technology, Cambridge, MA, USA
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  • Edwin L. Thomas

    Corresponding author
    1. Department of Mechanical Engineering and Materials Science, Rice University, Houston, TX, USA
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Abstract

A positive-tone 2D direct-write technique that can achieve sub-wavelength patterning by non-linear overlap effects in a conventional polymer system is described. The technique involves relatively inexpensive free-space optics, skips the usual development step, and promises the possibility of a lithographic method that is solvent-free.

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