Growth of Patterned Nanopore Arrays of Anodic Aluminum Oxide (pages 2015–2018)
J. Yan, G.V.R. Rao, M. Barela, D.A. Brevnov, Y. Jiang, H. Xu, G.P. López and P.B. Atanassov
Article first published online: 8 DEC 2003 | DOI: 10.1002/adma.200305360
An inexpensive procedure to fabricate highly ordered, patterned through-hole nanopore arrays of anodic aluminum oxide (AAO, see Figure) with intermittent aluminum supports has been developed. Silica was used as the anodization barrier. Using a two-step anodization process, straight nanopores of AAO are formed in the unpatterned areas; no pores are found in the patterned areas.