Fabrication of Ultrathin Single-Crystal Diamond Membranes (pages 4793–4798)
Barbara A. Fairchild, Paolo Olivero, Sergey Rubanov, Andrew D. Greentree, Felix Waldermann, Robert A. Taylor, Ian Walmsley, Jason M. Smith, Shane Huntington, Brant C. Gibson, David N. Jamieson and Steven Prawer
Version of Record online: 15 OCT 2008 | DOI: 10.1002/adma.200801460
Sub-micrometer layers of single-crystal diamond suitable for subsequent processing are fabricated. The method employed is a significant enabling technology for nanomechanical and photonic structures incorporating color centers. The process uses a novel double-implant process, annealing, and chemical etching to produce membranes. The thinnest layers achieved to date are 210 nm thick.