Large-Area Fabrication of Periodic Sub-15 nm-Width Single-Layer Graphene Nanorings (pages 199–204)
Yusin Pak, Huisu Jeong, Kwang-Ho Lee, Hui Song, Taehyeon Kwon, Jungsu Park, Woojin Park, Mun-Seok Jeong, Takhee Lee, Sunae Seo and Gun-Young Jung
Article first published online: 29 OCT 2012 | DOI: 10.1002/adma.201202626
A periodically aligned array of graphene nanorings (GRNRs) with a sub-15 nm linewidth at a pitch of 450 nm is fabricated with a large area, 9 cm2, through conventional nanoimprint lithography coupled with sophisticated metal deposition and plasma-etching processes. The existence of the single-layer GRNRs is verified by various techniques.