Superior Surface Transfer Doping of Diamond with MoO3

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Abstract

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A conductive diamond surface with highest yet reported sheet conductivity and unsurpassed thermal stability is shown to be due to surface transfer doping of hydrogen terminated diamond by a molybdenum trioxide (MoO3). Surface conductivities, as determined by Hall Effect measurements as function of temperature for different MoO3 thicknesses, have yielded total areal hole densities ranging from 7 × 1013 cm−2 to 1 × 1014 cm−2, exceeding those reported for H2O transfer doped diamond.

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