Monolithically Integrated Circuits from Functional Oxides
Rainer Jany, Christoph Richter, Carsten Woltmann, Georg Pfanzelt, Benjamin Förg, Marcus Rommel, Thomas Reindl, Ulrike Waizmann, Jürgen Weis, Julia A. Mundy, David A. Muller, Hans Boschker and Jochen Mannhart
Article first published online: 24 NOV 2013 | DOI: 10.1002/admi.201300031
A breakthrough in using functional oxides for electronics is reported. Integrated circuits based on LaAlO3/SrTiO3 interfaces and chips with 700 000 transistors are demonstrated. Providing the capability to process the signals of oxide devices such as sensors directly with oxide interfaces, these results illustrate the practicability and the potential of electronics based on functional oxides.