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Keywords:

  • surface plasmon resonance;
  • nanoimprints;
  • gold;
  • metamaterials
Thumbnail image of graphical abstract

High-resolution multilayer plasmonic nanostructures are made in a single fabrication step by nanocutting a gold and parylene C bilayer.. A silicon stamp is used to cut the gold film and vertically displace the nanocut shapes into the polymer. Periodic Au nanopatterns in single and double-layer configurations are fabricated down to the sub-100 nm range, supporting plasmon resonances in the visible range.