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Keywords:

  • metamaterials;
  • infrared radiation;
  • tunable;
  • MEMS
Thumbnail image of graphical abstract

An electrically tunable MEMS metamaterial that effectively manipulates radiation in the mid-infrared wavelength range is experimentally demonstrated. The metamaterial consists of an array of suspended metal-dielectric elements above a metal ground plane on a carrier substrate. A voltage applied between the metallic metamaterial array and the bottom ground plane layer permits adjustment of the distance between them, thus greatly altering the electromagnetic properties.