Low-Stress Silicon Nitride Platform for Mid-Infrared Broadband and Monolithically Integrated Microphotonics
Article first published online: 17 JUL 2013
© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Advanced Optical Materials
Volume 1, Issue 10, pages 732–739, October 2013
How to Cite
Lin, P. T., Singh, V., Lin, H.-Y. G., Tiwald, T., Kimerling, L. C. and Agarwal, A. M. (2013), Low-Stress Silicon Nitride Platform for Mid-Infrared Broadband and Monolithically Integrated Microphotonics. Advanced Optical Materials, 1: 732–739. doi: 10.1002/adom.201300205
- Issue published online: 17 OCT 2013
- Article first published online: 17 JUL 2013
- Manuscript Revised: 14 JUN 2013
- Manuscript Received: 9 MAY 2013
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