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Magnesiothermically Formed Porous Silicon Thin Films on Silicon-on-Insulator Optical Microresonators for High-Sensitivity Detection

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Abstract

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Integration of a thin uniform layer of highly porous silicon on top of ultra-compact silicon-on-insulator microresonators is experimentally demonstrated via magnesiothermic reduction, enabling increased surface area for analyte adsorption as well as high Q-factor (~22 000). The demonstrated sensitivity is ~0.8 pm (pg mm-2)-1, with an estimated detection limit of areal mass density being ~1 pg mm-2.

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