Optical Nanoscale Patterning Through Surface-Textured Polymer Films

Authors

  • Ming Fang,

    1. Department of Physics and Materials Science and Centre for Functional Photonics (CFP), City University of Hong Kong, Kowloon, Hong Kong S.A.R., PR China
    2. Shenzhen Research Institute, City University of Hong Kong, Shenzhen, PR China
    Search for more papers by this author
  • Hao Lin,

    1. Department of Physics and Materials Science and Centre for Functional Photonics (CFP), City University of Hong Kong, Kowloon, Hong Kong S.A.R., PR China
    2. Shenzhen Research Institute, City University of Hong Kong, Shenzhen, PR China
    Search for more papers by this author
  • Ho-Yuen Cheung,

    1. Department of Biology and Chemistry, City University of Hong Kong, Kowloon, Hong Kong S.A.R., PR China
    Search for more papers by this author
  • SenPo Yip,

    1. Department of Physics and Materials Science and Centre for Functional Photonics (CFP), City University of Hong Kong, Kowloon, Hong Kong S.A.R., PR China
    2. Shenzhen Research Institute, City University of Hong Kong, Shenzhen, PR China
    Search for more papers by this author
  • Fei Xiu,

    1. Department of Physics and Materials Science and Centre for Functional Photonics (CFP), City University of Hong Kong, Kowloon, Hong Kong S.A.R., PR China
    2. Shenzhen Research Institute, City University of Hong Kong, Shenzhen, PR China
    Search for more papers by this author
  • Chun-Yuen Wong,

    1. Department of Biology and Chemistry, City University of Hong Kong, Kowloon, Hong Kong S.A.R., PR China
    Search for more papers by this author
  • Johnny C. Ho

    Corresponding author
    1. Department of Physics and Materials Science and Centre for Functional Photonics (CFP), City University of Hong Kong, Kowloon, Hong Kong S.A.R., PR China
    2. Shenzhen Research Institute, City University of Hong Kong, Shenzhen, PR China
    Search for more papers by this author

Abstract

image

Controllable nanoscale patterning of a photoresist is achieved via flood UV illumination with the assistance of conformably attached surface-textured polymer films. These polymer films can be reused numerous times, enabling the cost-effective and reliable fabrication of highly ordered nanopatterned arrays for widespread applications, from plasmonic sensors and multifunctional coatings to photovoltaics.

Ancillary